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Applied Materials AMAT etch & metrology tools & spares for sale,
refurbish, install, maintain, test, and repair
.

Large lot of Amat spares available here

* Flouroware Htc 8000 Cassette/Box washer
* Technics RIE 8000 Etcher & Stripper
* Ultratech Mask Cleaner

FABRICATION EQUIPMENT
 
CVD SYSTEM, 3 TWIN CHAMBER TC PRODUCER S APPLIED MATERIALS 4
CVD SYSTEM, TRIPLE SPEED, 200MM CONCEPT 2 NOVELLUS 1
CVD SYSTEM, DUAL ALTUS, 200MM CONCEPT 2 NOVELLUS 1
IMPLANTER, HIGH CURRENT GSD III LED AXCELIS 1
IMPLANTER, HIGH CURRENT VIISTa 80 VARIAN 1
INSPECTION SYSTEM COMPLUS APPLIED MATERIALS 2
RTP SYSTEM GEMINI AXCELIS 4
INSPECTION SYSTEM LEXFAB 300 CAMECA 1
INSPECTION SYSTEM VERASEM 3D APPLIED MATERIALS 2
OVEN, POLY CURE 2020B GENESIS 2
PHOTO TRACK SK-200W DNS 12
PHOTO TRACK SK-2000 DNS 7
PHOTO TRACK, 3 BOWL COAT SK-W80B DNS 2
RTP SYSTEM SUMMIT 200 AXCELIS 2
Description Model # Manufacturer Qty
WHAT'S NEW
ETCH SYSTEM, SCCM UNITY M 85TD TEL 1
GLUE DISPENSER 5000 CAMELOT 1
WASHER MICROCEL SPEEDLINE 1
SCREEN PRINTER ULTRAFLEX MPM 2
PROBER APM-90 TSK 2
PROBER 3001CXE ELECTROGLAS 1
RETICLE CLEANER, CO2 SCS-1100 ECO SNOW 1
CD-SEM, RETICLE INSPECTION APPLIED MATERIALS 1
FOUP INSPECTION CV9812 AUGUST 1
PROBER P8i TEL 1
BALL MOUNT SBM361 SHIBUYA 1
INFRARED EMMISSIONS SYSTEM IREM1 IR LABS 1


Nikon (NSR), Canon (FPA), Ultratech, Canon (PLA/MPA), Karl SUSS (MA series)
TEL (Mark-5/7/8, ACT-8/12), DNS (SKW/SCW/SDW Series), AMAT (Centura),

STEAG / MATTSON / AST 280Ma RTP System, 4", 5", 6", process gas

YES CV 100PZ downstream resist stripper, strip rate up to 15,000/min, <10mV electron shift in 200 Gate Oxide, RS232 communication standard, PLC controller, fully automated system, 6 inch and can be modified for 3", 4" and 5",single wafer processing, automatic Z-Bot II, Microwave source

Lam Asher Mattson, Alcatel Diffusion Furnace/LPCVD TEL (Alpha-8 etc.),
Kokusai, Koyo  RTP/RTA, CVD/PVD CVD AMAT(Centura), Novellus (Concept 1/2)
Sputter/Evap AMAT (Endura), Wet Process Scrubber DNS (SSW series).


CVD Kokusai DJ-802V LPCVD-TEOS (D-PS LP-SIN) 6"
CVD Novellus Concept One CVD (P-TEOS) 6"
ETCH Anelva ILD-4032 / 4033 / 4100 Dry Etch (Oxide) 6"
ETCH TOK TCE-4802 TEOS Etch Back 6"

Varian 3110 E-Beam Evaporator.....SVG 8136

Please advise of application needs for:
Applied Materials PRODUCER Dual Twin Chamber / Missing Some Parts
Applied Materials 0040-18094 / P4 Chamber Applicator
Applied Materials DPS Chamber Stand



Applied Materials IPS Generator Rack
Applied Materials Producer CVD Chamber Body

Sputtering & Evaporation (PVD) AMAT
200mm SNNF SUB ZERO ESC HEATER

Sputtering & Evaporation (PVD) Applied Materials
Chemical Deposition (CVD) Applied Materials

(CVD) Applied Materials  200mm Producer Heater

Sputtering & Evaporation (PVD) Applied Materials
300mm MCA+ Heater

Chemical Deposition (CVD) Applied Materials
300mm Producer Heater

Dry Etching Applied Materials 5200 DPS Poly silicon
etcher 5200 DPS Poly silicon etcher

Sputtering & Evaporation (PVD) AMAT
8" SNNF MCA E-CHUCK NI PLATED 200mm

Dry etch, Applied Materials 8330 AME 8330 or 8310 systems



We have the ability and resources to service and maintain Applied Materials
semiconductor fabrication equipment such as; etch, metrology, and implantation.


S
ales@national-ate.com or call
508-598-7334   

NATIONAL A.T.E. Buys, Sells, & Brokers used and pre-owned, scanning
electron microscopes, semiconductor testers, IC test systems, semiconductor
production equipment, laser markers, microscopes, wafer probe inspection,
pre-owned SMT, surplus Applied Material AMAT FAB systems, and In-Circuit
test systems ICT.   We also offer consignment of customer owned used
and surplus equipment.