Applied Materials AMAT etch & metrology tools for sale,
with ability to refurbish, install, maintain, test, and repair.
Also, service, & refurbishment of AMAT implanters....... we also support:
P-5000 family, 5200 Centura - RTP, MxP, MxP+, ASP, DPS, 5300 Centura
HDP etch, 7830i and 7830Si Opal CD SEM, Orbot WF736, & 9500 implanters
Wanted tools:
* Flouroware Htc 8000 Cassette/Box washer
* Technics RIE 8000 Etcher & Stripper
* Ultratech 608 Mask Cleaner
Nikon (NSR), Canon (FPA), Ultratech, Canon (PLA/MPA), Karl SUSS (MA series)
TEL (Mark-5/7/8, ACT-8/12), DNS (SKW/SCW/SDW Series), AMAT (Centura),
Wetbench for TMAH etching, PC controller, up to 6" silicon wafer, excellent condition, was used for MEMS application for Electroplating etching, TMAH, KOH Etching, silicon etch, etc.
STEAG / MATTSON / AST 280Ma RTP System, 4", 5", 6", process gas in the wiring diagram: N2, O2, N2O, Ar, Looking at the available gases, you can run RTA, RTO. highest temp about 1100C, single wafer processing , includes Edwards 40 pump, excellent condition.
SVG 88 track system, 6", Cassette indexers automation, Arm Transport System (ATS) linked to each module, Spin Modules (Developer), Bake Modules, Chill Plate, Temperature Control Cart, CTD, HCIU, Refurbished in Q4 2005 (end-user spent $17,000 changing all tubings, Cybor filters, solenoids, resist pumps and valves).
YES CV 100PZ downstream resist stripper, strip rate up to 15,000/min, <10mV electron shift in 200 Gate Oxide, RS232 communication standard, PLC controller, fully automated system, 6 inch and can be modified for 3", 4" and 5",single wafer processing, automatic Z-Bot II, Microwave source
Lam Asher Mattson, Alcatel Diffusion Furnace/LPCVD TEL (Alpha-8 etc.),
Kokusai, Koyo RTP/RTA, CVD/PVD CVD AMAT(Centura), Novellus (Concept 1/2)
Sputter/Evap AMAT (Endura), Wet Process Scrubber DNS (SSW series).
CVD Kokusai DJ-802V LPCVD-TEOS (D-PS LP-SIN) 6"
CVD Novellus Concept One CVD (P-TEOS) 6"
ETCH Anelva ILD-4032 / 4033 / 4100 Dry Etch (Oxide) 6"
ETCH TEL TE-8500S Resist Etch Back 6"
ETCH TOK TCE-4802 TEOS Etch Back 6"
For sale: Varian 3110 E-Beam Evaporator.....SVG 8136
Please advise of application needs for:
Applied Materials PRODUCER Dual Twin Chamber / Missing Some Parts
Applied Materials 0040-18094 / P4 Chamber Applicator
Applied Materials DPS Chamber Stand
Applied Materials IPS Generator Rack
Applied Materials Producer CVD Chamber Body
Sputtering & Evaporation (PVD) AMAT
200mm SNNF SUB ZERO ESC HEATER
Sputtering & Evaporation (PVD) Applied Materials
Chemical Deposition (CVD) Applied Materials
Chemical Deposition (CVD) Applied Materials
200mm Producer Heater
Sputtering & Evaporation (PVD) Applied Materials
300mm MCA+ Heater
Chemical Deposition (CVD) Applied Materials
300mm Producer Heater
Dry Etching Applied Materials 5200 DPS Poly silicon
etcher 5200 DPS Poly silicon etcher
Sputtering & Evaporation (PVD) AMAT
8" SNNF MCA E-CHUCK NI PLATED 200mm
Dry etch, Applied Materials 8330 AME 8330 or 8310 systems
We have the ability and resources to service and maintain Applied Materials
semiconductor fabrication equipment such as; etch, metrology, and implantation.
Sales@national-ate.com or call 508-881-6863
NATIONAL A.T.E. Buys, Sells, & Brokers used and pre-owned, scanning
electron microscopes, semiconductor testers, IC test systems, semiconductor
production equipment, laser markers, microscopes, wafer probe inspection,
pre-owned SMT, surplus Applied Material AMAT FAB systems, and In-Circuit
test systems ICT. We also offer consignment of customer owned used
and surplus equipment.